Auger Electron Spectroscopy
The Laboratory operates two Phi Auger Electron Spectroscopy Units. The one pictured below is the Phi Model 595. This unit combines Auger analysis with the ability to perform X-ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectroscopy (SIMS). The multiple analysis techniques contained within this one ultra-high vacuum chamber
allow us to analyze most materials. We are using an RBD Enterprises interface and software, integrating all analysis techniques into one easy to use software package.
In addition to Phi 595 Auger, the laboratory also contains a dedicated Phi 590 Auger Spectrometer available to graduate students for research purposes. This system has an Argon ion sputter gun, and the same software and abilities to produce Auger Chemical Maps and SED Images as the Phi 595 Multiprobe system.
The Auger Spectroscopy systems are ideal for exploring the elemental chemical make-up of conducting and semiconducting materials. Auger analysis is inherently a near surface analysis technique as a result of the processes involved in creating and analyzing Auger electrons. As such, chemical information is derived from a depth of only a few atomic layers to a few nanometers and an lateral area limited by the electron beam size.
Capabilities:
Auger SED Images
Auger Chemical Mapping
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